دانلود کتاب Advanced Optical Spectroscopy Techniques for Semiconductors: Raman, Infrared, and Cathodoluminescence Spectroscopy

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Preface
Contents
About the Author
1 Introduction
1.1 Introduction
2 Raman and Infrared (IR) Spectroscopy
2.1 Principle of Raman Spectroscopy
2.1.1 Crystal Orientation Characterization
2.1.2 Stress Characterization
2.2 Principle of IR Spectroscopy
2.3 Raman Instrumentations
2.3.1 Excitation Source
2.3.2 Grating [20, 21]
2.3.3 Spectrometer [21]
2.3.4 Detector
2.4 IR Instrumentations
2.4.1 IR Source
2.4.2 Michelson Interferometer
2.4.3 Detector
2.4.4 Microscopy and Imaging
References
3 Photoluminescence (PL) Spectroscopy
3.1 PL Imaging Technique
References
4 Overview of Cathodoluminescence (CL) Spectroscopy
4.1 Introduction
4.2 Principle of CL Spectroscopy
4.3 Instrumentations
4.3.1 Excitation Source
4.3.2 Optical System
4.3.3 Detector
4.3.4 Cryostat
4.3.5 Comparison of CL and Scanning Near-Field Optical Microscopy (SNOM)-PL Spectroscopy
References
5 Applications of Raman, IR, and CL Spectroscopy
5.1 Silicon and Silicon Dioxide (SiO2)
5.1.1 Silicon
5.1.2 Silicon Dioxide
5.2 Strained Silicon
5.3 Silicon Processing of LSI Devices
5.4 Gallium Arsenide and Related Devices
5.5 Indium Phosphate and Related Devices
5.6 Wide-Gap Semiconductors: Gallium Nitride and Related Materials
5.7 Wide-Gap Semiconductors: Silicon Carbide and Related Materials
5.7.1 Silicon Carbide
5.7.2 Silicon Thermal Oxide Film (SiO2)
5.8 Wide-Gap Semiconductor: Zinc Oxide
5.9 Wide-Gap Semiconductor: Diamond
5.9.1 Diamond Films
5.9.2 Fano Effect in Diamond
5.9.3 Nano-diamond
5.9.4 Amorphous Diamond
5.9.5 Resonant Raman Scattering from Si- and N-doped a-C:H Films
5.9.6 Infrared Spectra of a-C:H Films
5.9.7 CL of Diamond
5.10 Next-Generation Semiconductor: Ga2O3
5.11 Quantum Dots
References
6 STEM-CL
6.1 Setup
6.2 Application
6.2.1 Crystalline Characterisation of GaN Flake by STEM-CL
6.2.2 Crystalline Characterisation of Single Crystalline ZnO Nanowire by STEM-CL
6.2.3 Localised Surface Plasmon of Nanometre-Sized Metal by STEM-EELS and STEM-CL Spectroscopy
References
7 Topics
7.1 DUV, UV, and NIR Raman Spectroscopy
7.2 AFM-Raman and AFM-IR Spectroscopy
7.2.1 AFM-Raman Spectroscopy
7.2.2 AFM-IR Spectroscopy
7.2.3 Optical Photothermal IR and Raman Spectroscopy
7.3 Terahertz Time-Domain Spectroscopy (THz-TDS)
7.4 SIMS-OES/-CL Spectroscopy
7.5 Time-Resolved CL Spectroscopy
References
Paper List
Proceeding
Index