دانلود کتاب Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

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Acknowledgements
Abstract
Contents
List of Symbols
List of Figures
List of Tables
1 Introduction and Motivation
2 Related Works and Basic Considerations
2.1 Profilometry
2.1.1 Atomic Force Microscopy
2.1.2 Confocal Laser Scanning Microscopy
2.1.3 Digital Holographic Microscopy
2.1.4 Phase-shifting Interferometry
2.1.5 Coherence Scanning Interferometry
2.1.6 Low-coherence Interferometry
2.2 Polymer Cross-linking Characterization
2.2.1 Soxhlet-type Extraction
2.2.2 Differential Scanning Caliometry
2.2.3 Dynamic Mechanical Analysis
2.2.4 Spectroscopy-based Methods
2.2.5 Low-coherence Interferometry and Other Optical Methods
2.2.6 Spatially-resolved Approaches
2.3 Film Thickness Measurement
2.3.1 Spectral Reflectometry
2.3.2 Spectroscopic Ellipsometry
2.4 Material dispersion
2.4.1 Thermo-optic coefficient
2.4.2 Photo-elastic influences
2.4.3 Characterization of dispersion
3 Surface Profilometry
3.1 Experimental Setup
3.2 Measurement Range and Resolution
3.3 Signal Formation and Analysis
3.3.1 Fitting of Oscillating Data
3.3.2 Frequency Analysis
3.3.3 Two-Stage Fitting
3.3.4 Error Estimation of the Data Processing
3.4 Two-Dimensional Approach and Characterization
3.4.1 Height Standard Evaluation
3.4.2 Repeatability and Resolution Characterization
3.4.3 Edge Effects
3.4.4 Roughness Evaluation
3.4.5 High-Dynamic Range Measurements
3.4.6 Dual-Channel Approach
3.5 Areal Measurement Approaches
3.5.1 Translation-Based Areal Information
3.5.2 Alternative Spectral Encoding for Areal Measurements
4 Polymer Characterization
4.1 Temporal Approach
4.2 Scan-free Approach
4.2.1 Wrapped-phase Derivative Evaluation (WPDE)
4.2.2 Spatially-resolved Approaches
4.3 Influences and Limitations
4.3.1 Error Parameters of the Temporal Approach
4.3.2 Error Propagation in WPDE
5 Thin-film Characterization
5.1 Setup Considerations
5.2 Characterization of Thin-films on Bulk Substrates
5.3 Characterization of Flexible Substrate Materials
6 Conclusion
A Glossary
Publications
Bibliography